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Mikroelektronische Prozesse für die VLSI-Fertigung (German Edition) Paperback – August 22, 2023

German Edition by Dr. Debasis Mukherjee (Author)
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"Micro-electronic Processes for VLSI Fabrication" ist ein umfassender und maßgeblicher Leitfaden, der sich mit den grundlegenden Prinzipien und fortgeschrittenen Techniken beschäftigt, die bei der Herstellung von Very Large Scale Integrated (VLSI)-Schaltungen zum Einsatz kommen. Das Buch beginnt mit einer ausführlichen Einführung in die Silizium-Halbleitertechnologie, die einen Überblick über Halbleitermaterialien, die Kristallstruktur von Silizium, intrinsische und extrinsische Halbleiter sowie die Feinheiten der Dotierung und Ladungsträgerkonzentration enthält. Der kritische Prozess der Oxidation wird detailliert behandelt, wobei thermische, trockene und nasse Oxidationstechniken zusammen mit Oxidwachstumsmodellen erläutert werden. Das Buch untersucht ausführlich die Methoden der Epitaxieabscheidung, einschließlich der chemischen Gasphasenabscheidung (CVD), der Molekularstrahlepitaxie (MBE) und der selektiven Epitaxie. Ionenimplantation und -diffusion, die für die Herstellung von Halbleiterbauelementen von zentraler Bedeutung sind, werden ebenfalls ausführlich erörtert, wobei auch Einblicke in Ionenimplantationsprozesse gewährt werden.
Previous page
  1. Print length
    240 pages
  2. Language
    German
  3. Publication date
    August 22, 2023
  4. Dimensions
    5.91 x 0.55 x 8.66 inches
  5. ISBN-10
    6206369560
  6. ISBN-13
    978-6206369561
  7. See all details
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Product details

  • Publisher ‏ : ‎ Verlag Unser Wissen (August 22, 2023)
  • Language ‏ : ‎ German
  • Paperback ‏ : ‎ 240 pages
  • ISBN-10 ‏ : ‎ 6206369560
  • ISBN-13 ‏ : ‎ 978-6206369561
  • Item Weight ‏ : ‎ 12.7 ounces
  • Dimensions ‏ : ‎ 5.91 x 0.55 x 8.66 inches

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